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Journal of Applied Physics -- February 1, 1991 -- Volume 69, Issue 3, pp. 1411-1424

Determination of roughness correlations in multilayer films for x-ray mirrors

D. E. Savage, J. Kleiner, N. Schimke, Y.-H. Phang, T. Jankowski, J. Jacobs, R. Kariotis, and M. G. Lagally

Department of Materials Science and Engineering, University of Wisconsin-Madison, Madison, Wisconsin 53706

(Received 25 May 1990; accepted 8 October 1990)

Interfacial roughness in multilayer films may be random or correlated, i.e., replicated from layer to layer. It is shown that these can be separated and quantified using x-ray diffraction rocking curves and a straightforward analysis. The lateral correlation length along the interfaces can additionally be determined. A quantitative evaluation for W/C multilayers shows that correlated roughness contributes significantly to the total roughness, even at length scales that are surprisingly short, of the order 2-6 nm. Journal of Applied Physics is copyrighted by The American Institute of Physics.

DOI: 10.1063/1.347281
PACS: 07.85.+n, 68.65.+g, 61.10.Dp, 68.35.Fx        Additional Information

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Published by the American Institute of Physics Copyright © 2002 American Institute of Physics