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Journal of Applied Physics -- November 15, 1992 -- Volume 72, Issue 10, pp. 4627-4633

Diffraction from multilayer films with partially correlated interfacial roughness

Y. H. Phang, R. Kariotis, D. E. Savage, and M. G. Lagally

University of Wisconsin-Madison, Madison, Wisconsin 53706

(Received 16 April 1992; accepted 3 August 1992)

The interfacial roughness in multilayer films is described by a model in which the parameters are directly related to those of microscopic growth processes. The height-height correlation function is extracted from this model. Stationary and nonstationary roughness are discussed. The diffuse intensity in diffraction from multilayer films that have various degrees of correlation in roughness between interfaces is calculated. The presence of perfect or partial interfacial roughness correlation can be distinguished unambiguously in the diffusely scattered intensity. Journal of Applied Physics is copyrighted by The American Institute of Physics.

DOI: 10.1063/1.352116
PACS: 61.10.-i, 68.65.+g, 68.55.Jk        Additional Information

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Published by the American Institute of Physics Copyright © 2002 American Institute of Physics