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Method of the reflections function in the X-ray reflectometry study of multilayers

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DOI: 10.1016/S0304-8853(01)00911-8
PII: S0304-8853(01)00911-8
Copyright © 2001 Published by Elsevier Science B.V. All rights reserved.

N. V. Kourtina ^,, E. A. Kravtsov and V. V. Ustinov

Institute of Metal Physics, Ural Division of the Russian Academy of Sciences, 18, S. Kovalevskaya St., GSP-170, Ekaterinburg, 620219, Russia

Available online 24 October 2001.

A theory of specular X-ray reflectivity from a rough interface based on the reflection function method is proposed. By using the approximation of the abruptly changing potential, we represent a reflectivity in the form of a series. Its first term reproduces the Nevot_¯Croce approximation and the second one gives the phase correction, which can be used to obtain the degree of interface asymmetry. The model X-ray reflectometry profiles for Fe/Cr superlattice are used to illustrate the method.

Author Keywords: Multilayers, metallic; Interface structure; X-ray reflectivity

References

(3K)
Fig. 1. The linear segment form of the profile g_{_}(z), corresponding to the interface of a width 2a. The "symmetric" case is shown by the dashed line, and the "asymmetric" one is depicted by the shaded region.

(6K)
Fig. 2. Model X-ray reflectivity profiles for multilayer structure Al₂O₃/Cr(70 Å)/[Fe(20 Å)/Cr(9 Å)]₈ calculated without asymmetric phase corrections (points), and with asymmetric phase correction (

₁=0.2, solid line). Wave length

=1.789Å.

Subject View:

1. V. Holy, U. Pietsch and T. Baumbach High-Resolution X-ray Scattering from Thin Films and Multilayers, Springer, Berlin, Heidelberg (1999).

2. X.-H. Zhou and S.-L. Chen Phys. Rep. 257 (1995), pp. 223_¯348.

3. V.V. Babikov Phase Function Method in Quantum Mechanics, Moscow, Nauka (1976) (in Russian) .

4. J.M. Bai, E.E. Fullerton and P.A. Montano Phys. B 221 (1996), p. 411. Abstract | Journal Format-PDF (256 K)

5. L. Nevot and P. Croce Rev. Phys. Appl. 15 (1980), p. 761. Abstract-INSPEC | $Order Document

6. L.G. Parratt Phys. Rev. 45 (1954), p. 359.

Corresponding author. Fax: +7-343-92-327-37; email: hope@imp.uran.ru

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