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(Received 25 February 1999; accepted 24 May 1999)
Transmission electron microscopy (TEM) observations of the microstructure of epitaxial Co thin films on GaAs(001) are reported. Cross-sectional TEM confirmed both bcc-Co and hcp-Co exist in a single 345 Å film. During film growth by molecular beam epitaxy, the epitaxial bcc-Co layer forms first at the GaAs interface, and hcp-Co islands subsequently form at the free surface of the bcc-Co layer when it reaches a thickness of about 145 Å. The bcc-Co film is single crystal at early stages of growth, but later may develop into multiple bcc crystals. The final hcp-Co grain size is roughly 1520 nm, and selected area electron diffraction showed these grains are strongly textured. Four previously unreported variants of the hcp-Co/GaAs orientation relationship were observed in which the c axis of the hcp unit cell lies out of the plane of the film.
PII: S0003-6951(99)02529-2
doi:10.1063/1.124370
PACS:
68.55.Jk, 81.15.Hi, 68.35.Bs
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