Skip Main Navigation Links ScienceDirect Logo Skip Main Navigation Links Register or Login: Password: Home Browse Search Forms My Alerts My Profile Help (Opens new window) Quick Search: within Quick Search searches abstracts, titles, and keywords. Click for more information. 11 of 72 Result List Previous Next Physica B: Condensed Matter Volume 248, Issues 1-4 , 15 June 1998, Pages 62-66 This Document SummaryPlus Full Text + Links PDF (131 K) ------------------------------------------------------------------------ Actions Cited By Save as Citation Alert Export Citation PII: S0921-4526(98)00204-X Copyright © 1998 Elsevier Science B.V. All rights reserved X-ray reflection and diffuse scattering from sputtered gold films C. Schug, P. Lamparter* <#cor*> and S. Steeb Max-Planck-Institut für Metallforschung, Seestrasse 92, D-70174 Stuttgart, Germany Available online 19 March 1999. Abstract Gold films were prepared by DC sputtering on quartz glass substrates under two different conditions, once in argon at 3×10-3 mbar (Au1-films), and once in residual air at 0.3 mbar (Au2-films). Specular X-ray reflection showed that the surface of the Au1-films was as smooth as that of the substrate, whereas the Au2-films were distinctly rougher. The diffuse scattering could be measured with a laboratory equipment by recording rocking curves and detector scans. The application of existing theories to the diffuse scattering data showed that slight modifications of the given equations were necessary. With these modifications the experimental data could be fitted very well, and the height¯height correlation functions of the surfaces of the films and of the substrate were determined. In the Au1-films the surfaces of the film and the substrate are perfectly correlated, whereas in the Au2-films no cross correlation is found. Author Keywords: Gold films; X-ray reflection; Diffuse scattering Article Outline 1. Introduction 2. Experimental 3. Results and discussion 3.1. Specular reflection 3.2. Diffuse scattering 4. Conclusions References Enlarge Image (6K) Fig. 1. Specular reflection with gold films Au1 and Au2: (round bullet, filled) experimental, (¯¯) theoretical fit. The curves for Au2 are shifted in the plot. Enlarge Image (7K) Fig. 2. Detector scan with Au1-film at small alpha, Greek=1.88 °: (round bullet, filled) experimental, (¯¯) theoretical fit according to Pynn, (- - -) according to Sinha. The fit curves are shifted in the plot. Enlarge Image (9K) Fig. 3. Detector scan (a) and rocking curve (b) with Au1-film at small alpha, Greek=1.88 °: (round bullet, filled) experimental, (- - -) fit with Eq. 1a <#fd1a>, Eq. 1b <#fd1b> and Eq. 1c <#fd1c>, (¯¯) fit with Eq. 2a <#fd2a>, Eq. 2b <#fd2b> and Eq. 2c <#fd2c>. The right-hand scale in (a) refers to the cross-correlation (dsmall sigma, Greek/dcapital Omega, Greek)CP (Eq. 2c <#fd2c>). Enlarge Image (9K) Fig. 4. Detector scan (a) and rocking curve (b) with Au1-film at small alpha, Greek=1.51 °: (round bullet, filled)experimental, (- - -) fit with Eq. 1a <#fd1a>, Eq. 1b <#fd1b> and Eq. 1c <#fd1c>, (¯¯) fit with Eq. 2a <#fd2a>, Eq. 2b <#fd2b> and Eq. 2c <#fd2c>. The right-hand scale in (a) refers to the cross-correlation (dsmall sigma, Greek/dcapital Omega, Greek)CP (Eq. 2c <#fd2c>). Enlarge Image (9K) Fig. 5. Detector scan (a) and rocking curve (b) with Au2-film: (round bullet, filled) experimental, (¯¯) fit with Eq. 2a <#fd2a>, Eq. 2b <#fd2b> and Eq. 2c <#fd2c>, (- - -) substrate contribution (dsmall sigma, Greek/dcapital Omega, Greek)SP (Eq. 2a <#fd2a>), (- · -) film contribution (dsmall sigma, Greek/dcapital Omega, Greek)FP (Eq. 2b <#fd2b>). Table 1. Parameters derived from specular reflectivity View Table (<1K) Table 2. Parameters from diffuse scattering (according to Pynn, modified ).cF: free surface of the film; cC: cross-correlation. The errors refer to the variation of the single scan fits View Table (<1K) References 1. B. Vidal and P. Vincent. Appl. Opt. 23 (1984), p. 1794. Abstract-Compendex | Abstract-INSPEC | $Order Document 2. S.K. Sinha, E.B. Sirota and S. Garoff. Phys. Rev. B 38 (1988), p. 2297. Abstract-INSPEC | $Order Document | Full Text via CrossRef 3. S.K. Sinha. Physica B 173 (1991), p. 25. Abstract-INSPEC | Abstract-Compendex | $Order Document 4. R. Pynn. Phys. Rev. B 45 (1992), p. 602. Abstract-INSPEC | $Order Document | Full Text via CrossRef 5. C. Schug, Thesis, University of Stuttgart, 1997. * <#bcor*>Corresponding author. Tel.: +49 711 2095 555; fax: +49 711 2265 722; e-mail: lamparter@vaxww1.mpi-stuttgart.mpg.de. This Document SummaryPlus Full Text + Links PDF (131 K) ------------------------------------------------------------------------ Actions Cited By Save as Citation Alert Export Citation Physica B: Condensed Matter Volume 248, Issues 1-4 , 15 June 1998, Pages 62-66 11 of 72 Result List Previous Next Home Browse Search Forms My Alerts My Profile Help (Opens new window) ScienceDirect Logo Send feedback to ScienceDirect Software and compilation © 2002 ScienceDirect. All rights reserved. ScienceDirect® is an Elsevier Science B.V. registered trademark. Your use of this service is governed by Terms and Conditions . Please review our Privacy Policy for details on how we protect information that you supply.