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Physica B: Condensed Matter
Volume 253, Issues 3-4, 15 October 1998, Pages 278-289

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PII: S0921-4526(98)00395-0
Copyright © 1998 Elsevier Science B.V. All rights reserved

Analysis of grazing incidence X-ray diffuse scatter from Co_¯Cu multilayers

I. Pape^a, T. P. A. Hase^a, B. K. Tanner^a^,^* and M. Wormington^b^,^c

^a Department of Physics, Durham University, South Road, Durham, DH1 3LE, UK
^b Bede Scientific Inc, Suite G-104, 14, Inverness Drive East, Englewood, CO 80112, USA
^c Department of Engineering, University of Warwick, Coventry, CV4 7AL, UK

Received 15 July 1997. Available online 19 March 1999.

Abstract

Grazing incidence diffuse X-ray scattering data from a Co_¯Cu multilayer with stepped interfaces grown by molecular beam epitaxy on a copper silicide buffer on a silicon substrate has been analysed using a computer code based on a fractal interface within the distorted wave Born approximation. We have extended the theory to include the scattering from a stepped interface and have shown that a single set of structural parameters can be used to obtain an excellent agreement between simulation and experimental data taken under very different X-ray optical conditions. The symmetry of the diffuse scatter on rotation about the surface normal can be explained if it arises from step bunching at the ends of extensive flat terraces. These steps have a self-affine nature, enabling the fractal model to be used successfully.

Author Keywords: X-ray scattering; Magnetic multilayers; Terraced interfaces

Article Outline

1. Introduction
2. Experimental configuration
3. Simulation technique 3.1. Specular scatter 3.2. Diffuse scattering
4. Results
5. The validity of a self-affine model for MBE growth
6. Conclusions

Acknowledgements
References

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Fig. 1. Experimental and simulated reflectivity curves from a Cu_¯Co multilayer.

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Fig. 2. Structure used to simulate the reflectivity curve in Fig. 3.

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Fig. 3. Transverse diffuse scan taken through the first -order Bragg peak on rotation about the sample's surface normal.

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Fig. 4. Separation of the diffuse and specular peaks as a function of the azimuthal angle. The solid line is a sine function fitted to the data points.

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Fig. 5. Transverse scans through a Kiessig (a) maxima and (b) minimum, wavelength of 1.3801 Å.

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Fig. 6. Simulated reciprocal space maps of the scattering from the Co/Cu multilayer (a) with vertically correlated roughness and (b) with vertically uncorrelated roughness. The asymmetry about the origin is a result of the decreasing illuminated area as the specimen angle, , is increased. The neighbouring isointensity contours represent an intensity ratio of 10². is the detector angle.

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Fig. 7. Specular and off-specular longitudinal scans showing interference fringes in the diffuse scatter, characteristic of strong correlated roughness.

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Fig. 8. Detector-only scan for three different incidence angles on the specimen.

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Fig. 9. Figuring and off-centred diffuse scatter displayed in reciprocal space.

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^*Corresponding author. Tel.: +44 191 374 2137; fax: +44 191 374 2111; e-mail: b.k.tanner@durham.ac.uk.

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Physica B: Condensed Matter
Volume 253, Issues 3-4, 15 October 1998, Pages 278-289

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