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PII: S0038-1098(98)00430-X
Copyright © 1998 Elsevier Science Ltd. All rights reserved


    Combination of specular and off-specular low-angle X-ray diffraction
    in the study of metallic multilayers

A. de Bernabé1 <#orf1>, 2 <#orf2>, * <#cor*>, M. J. Capitán2 <#orf2>, H.
E. Fischer3 <#orf3>, C. Quirós4 <#orf4>, C. Prieto1 <#orf1>, J. Colino1
<#orf1>, F. Mompeán1 <#orf1> and J. M. Sanz4 <#orf4>

1 Instituto de Ciencia de Materiales de Madrid, Consejo Superior de
Investigaciones Científicas, Cantoblanco, 28049- Madrid, Spain
2 European Synchrotron Radiation Facility, B.P. 220, 38043- Grenoble, France
3 Institut Max von Laue-Paul Langevin, B.P. 156, 38042- Grenoble, France
4 Departamento de Física Aplicada (C-XII), Universidad Autónoma de
Madrid, 28049- Madrid, Spain

Received 13 February 1998; revised 20 July 1998; accepted 25 August 1998
Available online 28 December 1998.

by J. Joffrin.


    Abstract

The use of resonant low-angle X-ray diffraction, combining specular and
off-specular scans, has been used to characterize accurately and
self-consistently the mesoscopic structure and the quality of interfaces
for a set of magnetron sputtered Co/Cu multilayers. In addition, the use
of a simulation program to fit experimental patterns, which is based on
the Distorted Wave Born Approximation has permitted to confirm its
validity in the region of total external reflection in a system having a
high degree of complexity.

Author Keywords: A. magnetic films and multilayers; A. surfaces and
interfaces; C. X-ray scattering


    Article Outline

1. Introduction
2. Experimental
3. Results and discussion
4. Conclusions

Acknowledgements
References



Enlarge Image
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(14K)
Fig. 1. Specular reflectivity patterns of Co/Cu multilayers recorded at
an incident energy just under the Co absorption K-edge (7704 eV). Points
correspond to the experimental patterns and solid lines have been
calculated by the simulation program.

Enlarge Image
</science?_ob=MiamiCaptionURL&_method=retrieve&_udi=B6TVW-3VDX5RC-Y&_image=figFig.2&_ba=2&_user=875668&_coverDate=11%2F05%2F1998&_rdoc=13&_fmt=summary&_orig=browse&_srch=%23toc%235545%231998%23998919989%2343992!&_cdi=5545&_acct=C000046981&_version=1&_urlVersion=0&_userid=875668&md5=7e9451b584ffb2a8863b93262fc6b073>
(11K)
Fig. 2. Rocking curves taken at constant values of 2straight theta,
small theta, Greek placed at a Kiessig maximum around 2straight theta,
small theta, GreekM=1.32°. For the sake of clarity capital Delta,
Greeksmall omega, Greek=small omega, Greek-straight theta, small theta,
GreekM has been taken as the variable. The fits to the experimental
patterns are based on the DWBA. The specular peak has not been
reproduced in the simulations.

Enlarge Image
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(11K)
Fig. 3. 2straight theta, small theta, Greek-rock curves with their fit.
The value of small omega, Greek was held constant and around 0.66°. The
variable used is capital Delta, Greek2straight theta, small theta,
Greek=2straight theta, small theta, Greek-2straight theta, small theta,
GreekM. For the simulations only the diffuse intensity has been taken
into account.

Table 1. Values obtained by the fit procedure described in the text.
From left to right, given values are: thickness of the Co layer,
thickness of the Cu layer, Co r.m.s. roughness, Cu r.m.s. roughness,
oxide layer thickness, oxide layer roughness, substrate roughness,
horizontal correlation length, vertical correlation length and Hurst
parameter View Table
</science?_ob=MiamiCaptionURL&_method=retrieve&_udi=B6TVW-3VDX5RC-Y&_image=tbl1&_ba=4&_user=875668&_coverDate=11%2F05%2F1998&_rdoc=13&_fmt=summary&_orig=browse&_srch=%23toc%235545%231998%23998919989%2343992!&_cdi=5545&_acct=C000046981&_version=1&_urlVersion=0&_userid=875668&md5=7f84e815e73d7508aed597f41c1e9175>
(<1K)


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