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Solid State Communications
Volume 108, Issue 10, 5 November 1998, Pages 769-773

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PII: S0038-1098(98)00430-X
Copyright © 1998 Elsevier Science Ltd. All rights reserved

Combination of specular and off-specular low-angle X-ray diffraction in the study of metallic multilayers

A. de Bernabé¹^,²^,^*, M. J. Capitán², H. E. Fischer³, C. Quirós⁴, C. Prieto¹, J. Colino¹, F. Mompeán¹ and J. M. Sanz⁴

¹ Instituto de Ciencia de Materiales de Madrid, Consejo Superior de Investigaciones Científicas, Cantoblanco, 28049- Madrid, Spain
² European Synchrotron Radiation Facility, B.P. 220, 38043- Grenoble, France
³ Institut Max von Laue-Paul Langevin, B.P. 156, 38042- Grenoble, France
⁴ Departamento de Física Aplicada (C-XII), Universidad Autónoma de Madrid, 28049- Madrid, Spain

Received 13 February 1998; revised 20 July 1998; accepted 25 August 1998 Available online 28 December 1998.

by J. Joffrin.

Abstract

The use of resonant low-angle X-ray diffraction, combining specular and off-specular scans, has been used to characterize accurately and self-consistently the mesoscopic structure and the quality of interfaces for a set of magnetron sputtered Co/Cu multilayers. In addition, the use of a simulation program to fit experimental patterns, which is based on the Distorted Wave Born Approximation has permitted to confirm its validity in the region of total external reflection in a system having a high degree of complexity.

Author Keywords: A. magnetic films and multilayers; A. surfaces and interfaces; C. X-ray scattering

Article Outline

1. Introduction
2. Experimental
3. Results and discussion
4. Conclusions

Acknowledgements
References

(14K)
Fig. 1. Specular reflectivity patterns of Co/Cu multilayers recorded at an incident energy just under the Co absorption K-edge (7704 eV). Points correspond to the experimental patterns and solid lines have been calculated by the simulation program.

(11K)
Fig. 2. Rocking curves taken at constant values of 2 straight theta, small theta, Greek

placed at a Kiessig maximum around 2 straight theta, small theta, Greek

_M=1.32°. For the sake of clarity capital Delta, Greek

_M has been taken as the variable. The fits to the experimental patterns are based on the DWBA. The specular peak has not been reproduced in the simulations.

(11K)
Fig. 3. 2 straight theta, small theta, Greek

-rock curves with their fit. The value of small omega, Greek

was held constant and around 0.66°. The variable used is capital Delta, Greek

-2

_M. For the simulations only the diffuse intensity has been taken into account.

Table 1. Values obtained by the fit procedure described in the text. From left to right, given values are: thickness of the Co layer, thickness of the Cu layer, Co r.m.s. roughness, Cu r.m.s. roughness, oxide layer thickness, oxide layer roughness, substrate roughness, horizontal correlation length, vertical correlation length and Hurst parameter

(<1K)

References

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19. de Bernabé, A., Capitán, M.J., Fischer, H.E., Lequien, S., Prieto, C., Colino, J., Mompeán, F., Lefebvre, S., Bessiere, M., Quirós, C. and Sanz, J.M., Vacuum (in press)

^*Corresponding author.

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Solid State Communications
Volume 108, Issue 10, 5 November 1998, Pages 769-773

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