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Phys. Rev. B 55, 13193–13202 (1997)

[Issue 19 – 15 May 1997 ]

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Reconstruction of surface morphology from coherent x-ray reflectivity

I. A. Vartanyants

Institute of Crystallography RAS, Leninsky pr. 59, 117333 Moscow, Russia

and Department of Physics, University of Illinois, Urbana, Illinois 61801

J. A. Pitney, J. L. Libbert, and I. K. Robinson

Department of Physics, University of Illinois, Urbana, Illinois 61801

The observation of coherent diffraction effects in recent measurements of x-ray reflectivity from Si surfaces is explained with the development of a simple kinematical theory. Some properties of the derived formalism are explored. We apply an algorithm developed by Gerchberg and Saxton and demonstrate its application to the reconstruction of the surface morphology from its coherent diffraction pattern. Initial testing with experimental data shows the method to be effective.

©1997 The American Physical Society

URL: http://link.aps.org/abstract/PRB/v55/p13193
DOI: 10.1103/PhysRevB.55.13193
PACS: 61.10.Dp, 42.30.Rx, 68.35.Bs

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