Materials Science Forum
Vols. 248-249 (1997) pp. 365-368

Corrosion Depth Profiles by Rutherford Backscattering Spectrometry and
Synchrotron X-Ray Reflectometry

E. Szilagyi, L. Bottyan, L. Deak, E. Gerdau, V.N. Gittsovich, 
A. Grof, E. Kotai, O. Leupold, D.L. Nagy, and V.G. Semenov

Keywords: Depth profiling, Rutherford Backscattering, X-Ray Reflectometry,
Synhrotron Radiation, Corrosion, Thin Films

Abstract:
Rutherford backscattering and synchrotron x-ray reflectometry was used to 
analyse the depth profile of elements in a sputtered iron thin film of 
originally 20 nm thickness following corrosion heat treatments. An "up to 
self-consistency" simultaneous evaluation of both kinds of spectra allowed 
for accurate determination both elemental composition and thickness of the 
sub-layers. Different iron oxide and oxi-hydroxide layers were identified 
on top of the iron layer depending on the treatment. An oxide layer 
overall composition close to Fe_2O_3 was also observed at the iron/glass 
interface.