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0921-4526(95)00900-0


    Probing interface roughness by X-ray scattering

Dick K. G. de Boera <#orfa>, * <#cor*> and Ann J. G. Leenaersa <#orfa>

a Philips Research Laboratories, Prof. Holstlaan 4 5656 AA Eindhoven The
Netherlands

Available online 12 February 1999.


    Abstract

X-ray scattering at glancing angles can be exploited to probe interface
roughness. Various theories for this technique will be reviewed. The
applicability of the theories is shown to depend on the relevant length
scales of sample and X-rays. Approximations are discussed and
improvements of the theory are suggested. Both specular reflection,
diffuse scattering and absorption of X-rays will be discussed. It will
be shown that relevant roughness parameters, like root-mean-square
roughness, lateral and perpendicular correlation lengths and the degree
of jaggedness can be extracted from the experiments. Possible forms for
the roughness correlation function are discussed. As an example, it is
shown how the interface roughness of an oxidic multilayer has been
probed by X-ray scattering.

* <#bcor*>Corresponding author.

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