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      Journal of Applied Physics -- March 15, 1995 -- Volume 77, Issue
      6, pp. 2380-2387

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      Diffuse scattering of x rays from nonideal layered structures

    M. Kopecký Institute of Physics, Czech Academy of Sciences, Na
Slovance 2, 180 40 Prague, Czech Republic

(Received 8 July 1994; accepted 22 November 1994)

A new theory of nonspecular x-ray scattering from layered systems with
random rough interfaces based on the distorted-wave Born approximation
is presented. Calculations of the diffuse scattering from a single gold
layer and two W/Si multilayer mirrors has been carried out. The theory
explains the existence of maxima and minima in the angular distribution
of diffusely scattered intensity resulting from standing-wave-enhanced
scattering and other dynamical effects. The influence of the mutual
correlation between individual interface profiles on x-ray scattering is
discussed. ©1995 American Institute of Physics.


doi: <http://ojps.aip.org/jhtml/doi.jsp>10.1063/1.358762
PACS: 61.10.Dp, 68.65.+g, 78.70.Ck        Additional Information
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