Journal of Applied Physics
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Journal of Applied Physics -- March 15, 1995 -- Volume 77, Issue 6, pp. 2380-2387

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Diffuse scattering of x rays from nonideal layered structures

M. Kopecký
Institute of Physics, Czech Academy of Sciences, Na Slovance 2, 180 40 Prague, Czech Republic

(Received 8 July 1994; accepted 22 November 1994)

A new theory of nonspecular x-ray scattering from layered systems with random rough interfaces based on the distorted-wave Born approximation is presented. Calculations of the diffuse scattering from a single gold layer and two W/Si multilayer mirrors has been carried out. The theory explains the existence of maxima and minima in the angular distribution of diffusely scattered intensity resulting from standing-wave-enhanced scattering and other dynamical effects. The influence of the mutual correlation between individual interface profiles on x-ray scattering is discussed. ©1995 American Institute of Physics.


doi:10.1063/1.358762
PACS: 61.10.Dp, 68.65.+g, 78.70.Ck        Additional Information

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