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Phys. Rev. B 49, 10668–10676 (1994)

[Issue 15 – 15 April 1994 ]

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Nonspecular x-ray reflection from rough multilayers

V. Holý

Department of Solid State Physics, Faculty of Science, Masaryk University, Kotlárská 2, 611 37 Brno, Czech Republic

T. Baumbach

Institut Laue-Langevin, Boîte Postale 156, Avenue des Martyrs, F-38042 Grenoble Cedex 9, France

X-ray reflection from periodical multilayers with randomly rough interfaces has been described within the distorted-wave Born approximation. The method is suitable for calculating both specular x-ray reflection and nonspecular (diffuse) scattering. In this paper, both in-plane and vertical correlations of the roughness profiles have been considered and it has been demonstrated that the vertical roughness correlation substantially affects the nonspecular scattering. The theory can explain resonant effects observed in the beam scattered nonspecularly from a periodical multilayer. The theoretical approach has been used for the study of interfacial roughness in a long-periodic AlAs/GaAs multilayer and good agreement has been achieved between the experimental results and the theory.

©1994 The American Physical Society

URL: http://link.aps.org/abstract/PRB/v49/p10668
DOI: 10.1103/PhysRevB.49.10668
PACS: 61.10.Dp, 68.35.-p, 68.65.+g

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