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Phys. Rev. B 47, 15896–15903 (1993)

[Issue 23 – 15 June 1993 ]

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X-ray reflection from rough layered systems

V. Holý, J. Kubena, and I. Ohlídal
Department of Solid State Physics, Faculty of Science, Masaryk University, Kotlarska 2, 611 37 Brno, Czech Republic
K. Lischka and W. Plotz
Institute of Optoelectronics, Kepler University, Altenbergerstrasse 69, 4040 Linz, Austria
Received 15 September 1992

The specular and nonspecular x-ray reflectivity of a rough multilayer is calculated on the basis of the distorted-wave Born approximation. The theory explains the existence of maxima in the angular distribution of a nonspecularly reflected wave. The interface roughness has been characterized by root-mean-square roughness, lateral correlation length, and the fractal dimension of the interface. It has been demonstrated that these parameters can be obtained from nonspecular reflectivity mreasurements. Calculations based on this theory compare well with data measured on rough layered samples.

©1993 The American Physical Society

URL: http://link.aps.org/abstract/PRB/v47/p15896
DOI: 10.1103/PhysRevB.47.15896
PACS: 78.66.-w


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References

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