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      Journal of Applied Physics -- February 1, 1991 -- Volume 69, Issue
      3, pp. 1411-1424

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      Determination of roughness correlations in multilayer films for
      x-ray mirrors

    D. E. Savage, J. Kleiner, N. Schimke, Y.-H. Phang, T. Jankowski, J.
    Jacobs, R. Kariotis, and M. G. Lagally Department of Materials
    Science and Engineering, University of Wisconsin-Madison, Madison,
Wisconsin 53706

(Received 25 May 1990; accepted 8 October 1990)

Interfacial roughness in multilayer films may be random or correlated,
i.e., replicated from layer to layer. It is shown that these can be
separated and quantified using x-ray diffraction rocking curves and a
straightforward analysis. The lateral correlation length along the
interfaces can additionally be determined. A quantitative evaluation for
W/C multilayers shows that correlated roughness contributes
significantly to the total roughness, even at length scales that are
surprisingly short, of the order 2?6 nm. Journal of Applied Physics is
copyrighted by The American Institute of Physics.


doi: <http://ojps.aip.org/jhtml/doi.jsp>10.1063/1.347281
PACS: 07.85.+n, 68.65.+g, 61.10.Dp, 68.35.Fx        Additional
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