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The scattering of x rays from nonideal multilayer structures

D. G. Stearns

Lawrence Livermore National Laboratory, P. O. Box 808, Livermore, California 94550

(Received 19 May 1988; accepted 16 September 1988)

A general theory is developed for the scattering of x rays from a single nonideal interface between two dielectric media. It is then extended to describe the scattering of x rays from a multilayer structure composed of many nonideal interfaces. The most unique feature of this theory is that there are no constraints on the physical structure of the interfaces; the interfaces can have any form of roughness or compositional inhomogeneity. A simple analytical expression is derived for both the near and far radiation field to first order, assuming that the scattering is weak. The theory is valid for arbitrary polarization and at all angles of incidence (measured from the normal) less than the critical angle for total external reflection. Finally, the results are applied to study the effect of different interface structures on the performance of multilayer x-ray optics. Journal of Applied Physics is copyrighted by The American Institute of Physics.

doi:10.1063/1.343131
PACS: 78.70.Ck, 68.65.+g, 07.85.+n, 68.35.Bs        Additional Information

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