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(Received 14 February 1989; accepted 30 March 1989)
Ion bombardment at grazing angles of incidence is used to smoothen the boundaries within multilayer x-ray mirrors. Increases in the reflectivity by a factor of 2 for soft x rays have been obtained for RhRu-C mirrors with periods of 60 Å. Applied Physics Letters is copyrighted by The American Institute of Physics.
DOI: 10.1063/1.101106
PACS:
42.78.Cf, 81.60.Bn, 78.65.-s, 68.65.+g
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