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Phys. Rev. Lett. 62, 788–791 (1989)

[Issue 7 – 13 February 1989 ]

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Thin-Film Growth and the Shadow Instability

R. P. U. Karunasiri, R. Bruinsma, and Joseph Rudnick
Department of Physics, University of California at Los Angeles, Los Angeles, California 90024
Received 3 October 1988

We propose a growth model for deposition of thin amorphous films by the sputtering technique. For small values of the diffusion constant, the film develops a self-similar mountain landscape. As the diffusion constant is increased a regime is reached where growth of compact flat films is possible up to a critical height. Further deposition leads to surface roughening.

©1989 The American Physical Society

URL: http://link.aps.org/abstract/PRL/v62/p788
DOI: 10.1103/PhysRevLett.62.788
PACS: 68.55.Jk, 05.70.Ln, 81.15.-z


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References

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  1. B. A. Movchan and A. V. Demchishin, Phys. Met. Metallogr. 28, 83 (1969).
  2. Thin Film Processes, edited by J. L. Vossen and W. Kern (Academic, New York, 1978), Pt. 2; A. G. Dirks and H. J. Leamy, Thin Solid Films 47, 219 (1977) [dot INSPEC].
  3. C. Herring, in Structure and Properties of Solid Surfaces, edited by R. Gomer and C. S. Smith (Univ. of Chicago, Chicago, 1953), pp. 5-72.
  4. M. Kardar, G. Parisi, and Yi-Cheng Zhang, Phys. Rev. Lett. 56, 889 (1986)  [SPIRES].
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  7. Omitted endnote.
  8. Omitted endnote.
  9. B. Mandelbrot, The Fractal Geometry of Nature (Freeman, San Francisco, 1982), p. 80.
  10. P. Meakin, Crit. Rev. Solid State Mater. Sci. 13, 143 (1987) [dot INSPEC].
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  12. J. Thornton, Ann. Rev. Mater. Sci. 7, 239 (1977); A. Manor, D. J. Srolovitz, P. S. Hagen, and B. G. Bukiet, Phys. Rev. Lett. 60, 424 (1988) .
  13. A. Zangwill, private communication.


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