Review of Scientific Instruments A monthly journal devoted to scientific instruments, apparatus, and techniques.
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Review of Scientific Instruments -- May 1986 -- Volume 57, Issue 5, pp. 937-940

Mass spectrometer controlled electron beam evaporation synthesis of multilayered materials

W. Sevenhans, J.-P. Locquet, and Y. Bruynseraede

Laboratorium voor Vaste Stof-Fysika en Magnetisme, Katholieke Universiteit Leuven, B-3030 Leuven, Belgium

(Received 25 November 1985; accepted 22 January 1986)

A UHV apparatus equipped with two high-power electron guns is extended with a multichannel quadrupole mass spectrometer which accurately controls the deposition rate. A rotating substrate holder is used for deposition of multilayers at room temperature; a fixed substrate holder enables one to prepare layered structures at liquid N₂ temperature. A home-built load lock in combination with an extended travel sample manipulator permits a rapid change of the samples without breaking vacuum. The system has been used to deposit Nb/Cu and Pb/Ge multilayers and preliminary structural measurements indicate the samples are of high quality. Review of Scientific Instruments is copyrighted by The American Institute of Physics.

doi:10.1063/1.1138838
PACS: 81.15.Ef, 41.80.Dd, 07.30.-t        Additional Information

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