APS Journals Homepage Physical Review Online Archive Homepage Contact Information Online Journal Help Physical Review Online Archive Homepage Browse Available Volumes Search Members Subscription Information What's New in PROLA?
Volume: Page/Article:

Article Collection: View Collection  Help (Click on the Check Box to add an article.)

Phys. Rev. B 31, 5348–5354 (1985)

[Issue 8 – 15 April 1985 ]

Previous article | Next article | Issue 8 contents ]

Add to article collection View Page Images or PDF (1361 kB)


Critical development stages for the reactive Cr-GaAs(110) interface

J. H. Weaver, M. Grioni, and J. Joyce
Department of Chemical Engineering and Materials Science, University of Minnesota, Minneapolis, Minnesota 55455
Received 27 August 1984

High-resolution synchrotron radiation photoemission studies provide a detailed microscopic view of reactions at a refractory-metal/GaAs interface. Core-level and valence-band results indicate weak interaction between the Cr adlayer and the substrate at low coverage, i.e., no reaction products are observed although the Fermi level is pinned by ~1 A-ring. Instead, a metastable Cr overlayer forms and, at a critical coverage of ~2 A-ring, it triggers extensive substrate disruption. A model is presented to account for the reaction onset. Between ~2 and ~8 A-ring the morphology changes rapidly, corresponding to atomic intermixing and formation of CrGa and CrAs bonds. Arsenic out-diffuses readily through the intermixed region and is present in chemical states corresponding to a Cr-As phase and surface-segregated As. Gallium out-diffuses very little, but it too forms a Cr-Ga phase. At coverages of ~50 A-ring the valence bands are dominated by Cr d states and resemble those of Cr metal, but core studies show that arsenic is still present in substantial quantities (~20% of original level).

©1985 The American Physical Society

URL: http://link.aps.org/abstract/PRB/v31/p5348
DOI: 10.1103/PhysRevB.31.5348
PACS: 68.30.+z, 68.45.Da, 79.60.Cn


Add to article collection View Page Images or PDF (1361 kB)

Previous article | Next article | Issue 8 contents ]


References

(Reference links marked with dot may require a separate subscription.)
  1. The recent exhaustive review of metal/semiconductor phenomena by Brillson contains 1050 references to a great deal of excellent work and valuable insight into reactions at interfaces [L. J. Brillson, Surf. Sci. Rep. 2, 123 (1982)] [dot INSPEC].
  2. K. N. Tu and J. W. Mayer, in Thin Films—Interdiffusion and Reactions, edited by J. M. Poate, K. N. Tu, and J. W. Mayer (Wiley-Interscience, New York, 1978), and references therein.
  3. For recent reviews, see P. Ho, J. Vac. Sci. Technol. A 1, 745 (1983); P. Ho and G. W. Rubloff, Thin Solid Films 89, 433 (1982) [dot INSPEC]; and, 93, 21 (1982) [dot INSPEC].
  4. A. Hiraki, M. A. Nicolet and J. W. Mayer, Appl. Phys. Lett. 18, 178 (1971) [dot INSPEC].
  5. L. Braicovich, C. M. Garner, P. R. Skeath, C. Y. Su, P. W. Chye, I. Lindau and W. E. Spicer, Phys. Rev. B 20, 5131 (1979); L. Braicovich, I. Abbati, J. W. Miller, I. Lindau, S. Schwarz, P. R. Skeath and W. E. Spicer, J. Vac. Sci. Technol. 17, 1005 (1980), and references therein [dot SPIN][dot INSPEC].
  6. L. J. Brillson, A. D. Katnani, M. Kelly and G. Margaritondo, J. Vac. Sci. Technol. A 2, 551 (1984) [dot INSPEC].
  7. A. Franciosi, J. H. Weaver, D. G. O'Neill, Y. Chabal, J. E. Rowe, J. M. Poate, O. Bisi and C. Calandra, J. Vac. Sci. Technol. 21, 624 (1982) [dot SPIN][dot INSPEC].
  8. A. Franciosi and J. H. Weaver, Phys. Rev. B 27, 3554 (1983); and, 26, 546 (1982); A. Franciosi, D. G. O'Neill and J. H. Weaver, J. Vac. Sci. Technol. B 1, 524 (1983) [dot INSPEC]; and, Phys. Rev. B 28, 4889 (1983).
  9. P. J. Grunthaner, F. J. Grunthaner and J. W. Mayer, J. Vac. Sci. Technol. 17, 924 (1980) [dot SPIN][dot INSPEC]; and, 19, 649 (1981) [dot SPIN][dot INSPEC].
  10. Zunger has reviewed experimental and theoretical work pertaining to Al/GaAs [A. Zunger, Phys. Rev. B 24, 4372 (1981)]. See also A. Zunger, Thin Solid Films 104, 301 (1983) [dot INSPEC]; R. R. Daniels, A. D. Katnani, G. Margaritondo and A. Zunger, Phys. Rev. Lett. 49, 895 (1982).
  11. R. Ludeke, T. C. Chiang and D. E. Eastman, J. Vac. Sci. Technol. 21, 599 (1982) [dot SPIN][dot INSPEC]; R. Ludeke and G. Landgren, 19, 667 (1981) [dot SPIN][dot INSPEC]; and, Phys. Rev. Lett. 47, 875 (1981).
  12. W. Ranke and K. Jacobi, Progress in Surface Science (Pergamon, New York, 1981), Vol. 10, pp. 1–52.
  13. P. Skeath, C. Y. Su, I. Lindau and W. E. Spicer, J. Vac. Sci. Technol. 17, 874 (1980) [dot SPIN][dot INSPEC]; and, 19, 556 (1981) [dot SPIN][dot INSPEC]; W. E. Spicer, I. Lindau, P. Skeath and C. Y. Su, J. Vac. Sci. Technol.ibid. 17, 1019 (1980) [dot SPIN][dot INSPEC]; P. Skeath, I. Lindau, C. Y. Su and W. E. Spicer, Phys. Rev. B 28, 7051 (1983).
  14. L. J. Brillson, J. Vac. Sci. Technol. 16, 1137 (1979) [dot SPIN][dot INSPEC]; Phys. Rev. Lett. 40, 260 (1978); and, 46, 838 (1981).
  15. N. G. Stoffel, M. Kelly and G. Margaritondo, Phys. Rev. B 27, 6561 (1983).
  16. R. Z. Bachrach, J. Vac. Sci. Technol. 15, 1340 (1978) [dot SPIN][dot INSPEC]; L. J. Brillson, R. Z. Bachrach, R. S. Bauer and J. McMenamin, Phys. Rev. Lett. 42, 397 (1979).
  17. C. B. Duke, A. Paton, R. J. Meyer, L. J. Brillson, A. Kahn, D. Kanani, J. Carelli, J. L. Ley, G. Margaritondo and A. D. Katnani, Phys. Rev. Lett. 46, 440 (1981).
  18. J. L. Freeouf and J. Woodall, Appl. Phys. Lett. 39, 727 (1981) [dot SPIN][dot INSPEC].
  19. J. G. Clabes, G. W. Rubloff and T. Y. Tan, Phys. Rev. B 29, 1540 (1984) for V/Si; R. Butz, G. W. Rubloff and P. S. Ho, J. Vac. Sci. Technol. A 1, 771 (1983) for Ti/Si [dot INSPEC].
  20. A. Franciosi, D. J. Peterman, J. H. Weaver and V. L. Moruzzi, Phys. Rev. B 25, 4981 (1982) for Cr/Si.
  21. A. Franciosi, J. H. Weaver, P. Perfetti, A. D. Katnani and G. Margaritondo, Solid State Commun. 47, 427 (1983) [dot INSPEC]; and, Phys. Rev. B 29, 3293 (1984) for Sm/Si and Sm/Ge.
  22. J. H. Weaver, A. Franciosi and V. L. Moruzzi, Phys. Rev. B 29, 3293 (1984) for disilicides and bonding.
  23. M. Grioni, J. Joyce, S. A. Chambers, D. G. O'Neill, M. del Giudice and J. H. Weaver, Phys. Rev. Lett. 53, 2331 (1984); M. Grioni, J. Joyce, M. del Giudice, D. G. O'Neill and J. H. Weaver, Phys. Rev. B 30, 7370 (1984) for Ce/Si.
  24. G. Rossi, J. Nogami, J. J. Yeh and I. Lindau, J. Vac. Sci. Technol. B 1, 530 (1983) [dot INSPEC]; G. Rossi, J. Nogami, I. Lindau, I. Abbati, L. Braicovich, U. del Pennino and S. Nannarone,, 781 (1983) for Yb/Si.
  25. P. Oelhafen, J. L. Freeouf, T. S. Kuan, T. N. Jackson and P. E. Batson, J. Vac. Sci. Technol. B 1, 588 (1983) for Pd/GaAs [dot INSPEC].
  26. G. Margaritondo, N. G. Stoffel and J. H. Weaver, J. Phys. E 12, 602 (1979).
  27. D. E. Eastman, T.-C. Chiang, P. Heimann and F. J. Himpsel, Phys. Rev. Lett. 45, 656 (1980).
  28. For a review of the literature on clusters, see P. H. Citrin and G. K. Wertheim, Phys. Rev. B 27, 3176 (1983), and extensive references therein.
  29. J. F. van der Veen, L. Smit, P. K. Larsen and J. H. Neave, Physica (Utrecht) 117 & 118B, 822 (1983).
  30. L. Ley, R. A. Pollak, S. P. Kowalczyk, R. McFeely and D. A. Shirley, Phys. Rev. B 8, 641 (1973).
  31. L. J. Brillson, R. Z. Bachrach, R. S. Bauer and J. McMenamin, Phys. Rev. Lett. 42, 397 (1979).
  32. XPS studies of 15- and 2000-Å-thick overlayers of several metals on GaAs(100) have been reported by J. R. Waldrop and R. W. Grant [Appl. Phys. Lett. 34, 630 (1979)]. S. P. Kowalczyk, J. R. Waldrop, and R. W. Grant reported studies of Ti and Cr reactivity with GaAs(100) having native oxide layers [J. Vac. Sci. Technol. 19, 611 (1981)].
  33. C. D. Gelatt, A. R. Williams and V. L. Moruzzi, Phys. Rev. B 27, 2005 (1983).


Add to article collection View Page Images or PDF (1361 kB)

[Show Articles Citing This One] Requires Subscription

Previous article | Next article | Issue 8 contents ]








[ APS   |   APS Journals   |   PROLA Homepage   |   Browse   |   Search ]
E-mail: prola@aps.org