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Nuclear Instruments and Methods in Physics Research Section A: Accelerators,Spectrometers,Detectors and Associated Equipment
Volume 470, Issues 1-2, 1 September 2001, Pages 145-154
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DOI: 10.1016/S0168-9002(01)01031-2
PII: S0168-9002(01)01031-2

Copyright © 2001 Elsevier Science B.V. All rights reserved.

An experimental study of the qperpendicular-dependence of X-ray resonant diffuse scattering from multilayers

V. A. Chernova, V. I. Kondratievb, N. V. Kovalenkob and S. V. MytnichenkoCorresponding Author Contact Information, E-mail The Corresponding Author, c

a Siberian SR Centre, Budker Institute of Nuclear Physics, 11 Lavrentyev Ave., 630090 Novosibirsk, Russia
b Budker Institute of Nuclear Physics, 11 Lavrentyev Ave., 630090 Novosibirsk, Russia
c Institute of Solid State Chemistry, 18 Kutateladze Str., 630128 Novosibirsk, Russia

Available online 28 August 2001.

Abstract

A study of X-ray resonant diffuse scattering from the W/Si multilayer was performed to examine its dependence on the momentum transfer normally to the specular diffraction plane, qperpendicular. The data obtained show two evident disagreements with the present theoretical approximations. Firstly, when the incident angle was approximately equal to the Bragg angle, additional scattering concentrated in the specular diffraction plane was observed. Secondly, the qperpendicular-dependence of the quasi-Bragg scattering intensity obtained from these experiments is not the same, at least at the small momentum transfer, as can be obtained from the scans in the specular diffraction plane, having tendency to accumulate near this plane. The possible reasons for these phenomena are discussed.

Author Keywords: Multilayers; X-ray diffuse scattering

PACS classification codes: 68.55.-a; 61.10.Kw

Article Outline

1. Introduction
2. Experimental
3. Bragg-enhanced diffuse scattering
4. Quasi-Bragg scattering
5. Conclusion
Acknowledgements
References


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Fig. 1. The diffuse scattering geometry: straight theta, small theta, Greek0 and straight theta, small theta, Greek1 are the incident and diffracted angles, respectively; small omega, Greek=straight theta, small theta, Greek0-straight theta, small theta, Greek1; small phi, Greek is the azimuthal angle; qz is the momentum transfer normal to the lateral planes; q|| is the momentum transfer parallel to the lateral planes and specular diffraction plane; qperpendicular is the momentum transfer parallel to the lateral planes and normal to the specular diffraction plane.

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Fig. 2. The fine structure of the Bragg reflection from a multilayer as may be observed in any standard diffuse scattering experiment. Here the sets of transverse scans (small omega, Greek-scans) are parallel to the ordinate axis, whereas the total diffraction angles are plotted along the vertical axis.

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Fig. 3. The nature of quasi-Bragg diffuse scattering.

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Fig. 4. The experimental setup: (a) the conventional triple-axis geometry with additional horizontal slits; (b) the experimental scheme with an image plate; (c) the slit geometry.

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Fig. 5. The diffraction space maps of the first order Bragg reflection: (a) the conventional geometry; (b) the diffuse scattering in the specular diffraction plane was cut off by the slits.

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Fig. 6. The diffraction space map obtained by the use of the slit experimental setup (Fig. 4c).

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Fig. 7. The diffraction space map of diffuse scattering from the W/Si multilayer obtained with the use of an image plate: the incident beam sizes are 100×100 small mu, Greekm, the distance from the scattering point to the image plate is 520 mm, small phi, Greek is the azimuthal angle, 2straight theta, small theta, Greek and 2straight theta, small theta, GreekB are the total and double Bragg angles, respectively.

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Fig. 8. The diffuse scattering intensities versus the momentum transfer: the solid curve is normal to the specular diffraction plane, qperpendicular; the dashed curve is in the specular diffraction plane, with integration over small phi, Greek, q||. The logarithmic intensity scale was used.

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Fig. 9. The small phi, Greek-profiles of the quasi-Bragg scattering (points) and specular reflection (solid curve) were shown using a linear scale. The width of specular reflection demonstrates the experimental angle resolution.

References

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16. V.A. Chernov, E.D. Chkhalo, N.V. Kovalenko and S.V. Mytnichenko Nucl. Instrum. and Meth. A 448 (2000), p. 276. SummaryPlus | Full Text + Links | PDF (193 K)

Corresponding Author Contact Information Corresponding author. Siberian SR Centre, Budker Institute of Nuclear Physics, 11 Lavrentyev Ave., 630090 Novosibirsk, Russia. Tel.: +7-3832-394013; fax: +7-3832-394163; email: s.v.mytnichenko@inp.nsk.su
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Nuclear Instruments and Methods in Physics Research Section A: Accelerators,Spectrometers,Detectors and Associated Equipment
Volume 470, Issues 1-2, 1 September 2001, Pages 145-154


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