Journal of Applied Physics AIP's archival journal for significant new results in applied physics. [JAP Home ] [All Online Issues: Browse | Search ] [Article Purchases ] [SPIN Database: Browse | Search ] [Forthcoming Abstracts ] [HELP ] [EXIT ] ------------------------------------------------------------------------ Article Collection: View Collection | Help (Click on the COLLECT ARTICLE to add an article.) ------------------------------------------------------------------------ [ Previous / Next Abstract | Issue Table of Contents | Bottom of Page <#bottom> ] Journal of Applied Physics -- January 15, 2001 -- Volume 89, Issue 2, pp. 1101-1107 Full Text: [ HTML Sectioned HTML PDF (139 kB) GZipped PS ] Order ------------------------------------------------------------------------ Nonspecular x-ray reflectivity study of roughness scaling in Si/Mo multilayers J. M. Freitag and B. M. Clemens Department of Materials Science and Engineering, Stanford University, Stanford, California 94305-2205 (Received 10 July 2000; accepted 17 October 2000) The interfacial roughness and lateral correlation length of a series of Si/Mo multilayers with bilayer period 69 Ĺ and number of bilayers ranging from 5 to 40 have been characterized by diffuse x-ray scattering. Superlattice peaks are preserved in offset radial scans indicating a high degree of conformality in the roughness. The lateral correlation length xi increases with total film thickness h as xi~h0.55; however, the magnitude of the roughness is approximately 2 Ĺ for all film thicknesses, in disagreement with scaling laws for self-affine growing surfaces. This observation suggests that interfaces retard the evolution of high-frequency roughness while replicating longer wavelength roughness from one layer to the next ©2001 American Institute of Physics. doi: 10.1063/1.1332095 PACS: 68.65.Ac, 68.65.Cd, 78.70.Ck Additional Information ------------------------------------------------------------------------ Full Text: [ HTML Sectioned HTML PDF (139 kB) GZipped PS ] Order ------------------------------------------------------------------------ References Citation links [e.g., Phys. Rev. D 40, 2172 (1989)] go to online journal abstracts. Other links (see Reference Information ) are available with your current login. Navigation of links may be more efficient using a second browser window . 1. D. G. Stearns, D. P. Gaines, D. W. Sweeney, and E. M. Gullikson, J. Appl. Phys. 84, 1003 (1998) . 2. F. Family and T. Vicsek, J. Phys. A 18, 75 (1985). [INSPEC] 3. W. M. Tong et al., Phys. Rev. Lett. 72, 3374 (1994) . [MEDLINE] 4. R. W. James, The Optical Principles of the Diffraction of X Rays (Ox Bow Press, Woodbridge, 1982). 5. S. K. Sinha, E. B. Sirota, and S. Garoff, Phys. Rev. B 38, 2297 (1988) . [MEDLINE] 6. G. Palasantzas and J. Krim, Phys. Rev. B 48, 2873 (1993) . [MEDLINE] 7. T. Salditt et al., Phys. Rev. B 51, 5617 (1995) . [MEDLINE] 8. J. M. Cowley, Diffraction Physics (North?Holland, Amsterdam, 1984). 9. J. M. Elson, J. P. Rahn, and J. M. Bennett, Appl. Opt. 19, 669 (1980). [SPIN] 10. A. P. Payne and B. M. Clemens, Phys. Rev. B 47, 2289 (1993) . [MEDLINE] 11. J. M. Freitag and B. M. Clemens, Proc. Mater. Res. Soc.562, 177 (1999). 12. D. G. Stearns, R. S. Rosen, and S. P. Vernon, Proc. SPIE 1547, 2 (1992). 13. K. Holloway, D. K. Ba, and R. Sinclair, J. Appl. Phys. 65, 474 (1989) . 14. D. E. Savage et al., J. Appl. Phys. 69, 1411 (1991) . 15. Y. Yoneda, Phys. Rev. 131, 2010 (1963) . 16. D. E. Savage, N. Schimke, Y. H. Phang, and M. G. Lagally, J. Appl. Phys. 71, 3283 (1992) . 17. A.-L. Barabási and H. E. Stanley, Fractal Concepts in Surface Growth (Cambridge University Press, Cambridge, 1995). The American Institute of Physics is a member of CrossRef . ------------------------------------------------------------------------ Full Text: [ HTML Sectioned HTML PDF (139 kB) GZipped PS ] Order ------------------------------------------------------------------------ Citing Articles This list contains links to other online articles that cite the article currently being viewed. 1. Interface roughness correlation due to changing layer period in Pt/C multilayers Amitesh Paul et al., Phys. Rev. B 65, 245416 (2002) ------------------------------------------------------------------------ Full Text: [ HTML Sectioned HTML PDF (139 kB) GZipped PS ] Order [ Previous / Next Abstract | Issue Table of Contents | Top of Page <#top> ] ------------------------------------------------------------------------ Article Collection: View Collection Help (Click on the COLLECT ARTICLE to add an article.) ------------------------------------------------------------------------ [JAP Home ] [All Online Issues: Browse | Search ] [SPIN Database: Browse | Search ] [HELP ] [EXIT ] ------------------------------------------------------------------------ Published by the American Institute of Physics Copyright © 2002 American Institute of Physics