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10.1016/S0168-9002(01)01015-4
PII: S0168-9002(01)01015-4
Copyright © 2001 Elsevier Science B.V. All rights reserved.


    The use of quasi-Bragg diffuse scattering for express measurement of
    changes in multilayer d-spacing

V. A. Chernova <#affa>, N. V. Kovalenkob <#affb> and S. V.
MytnichenkoCorresponding Author Contact Information <#m4.cor*>, E-mail
The Corresponding Author <mailto:s.v.mytnichenko@inp.nsk.su>, c <#affc>

a Siberian SR Centre at Budker Institute of Nuclear Physics, 11
Lavrentyev Avenue, 630090 Novosibirsk, Russia
b Budker Institute of Nuclear Physics, 11 Lavrentyev Avenue, 630090
Novosibirsk, Russia
c Institute of Solid State Chemistry, 18 Kutateladze Str., 630128
Novosibirsk, Russia

Available online 28 August 2001.


    Abstract

The possibility of the use of quasi-Bragg diffuse scattering for express
measurements of changes in multilayer d-spacing was studied. The error
of this method was shown to be minimal, if the incident or scattered
angles are sufficiently far from the critical total external reflection
or Bragg angles. As an example, the measurements of the W/Si multilayer
mirror with linearly varying d-spacing are presented.

Author Keywords: X-ray diffuse scattering; Multilayer mirror

PACS classification codes: 68.55.-a; 61.10.Kw


    Article Outline

1. Introduction
2. Experimental
3. Results
4. Conclusion
Acknowledgements
References



Enlarge Image
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(6K)
Fig. 1. The principal scheme of the experiment. Quasi-Bragg scattering
occurs at the total scattered angle equal to double Bragg angle
(2straight theta, small theta, GreekB), independent of the incident angle.

Enlarge Image
</science?_ob=MiamiCaptionURL&_method=retrieve&_udi=B6TJM-43VKCM5-17&_image=fig2&_ba=2&_user=875668&_coverDate=09%2F01%2F2001&_rdoc=31&_fmt=summary&_orig=browse&_srch=%23toc%235314%232001%23995299998%23262784!&_cdi=5314&_acct=C000046981&_version=1&_urlVersion=0&_userid=875668&md5=562952b1412be52f80ab2e099681e0db>
(4K)
Fig. 2. The multilayer d-spacing value measured at the same sample point
by quasi-Bragg scattering versus the off-specular angle, small omega,
Greek. The central black point is the d-spacing value measured by the
conventional specular diffraction.

Enlarge Image
</science?_ob=MiamiCaptionURL&_method=retrieve&_udi=B6TJM-43VKCM5-17&_image=fig3&_ba=3&_user=875668&_coverDate=09%2F01%2F2001&_rdoc=31&_fmt=summary&_orig=browse&_srch=%23toc%235314%232001%23995299998%23262784!&_cdi=5314&_acct=C000046981&_version=1&_urlVersion=0&_userid=875668&md5=cd8978b77c06635f6029ab71cf705fab>
(3K)
Fig. 3. The d-spacing values measured with the use of quasi-Bragg
scattering along the gradient direction. The black points are values
measured by the conventional specular diffraction.


    References

1. A.V. Andreev, A.G. Michette and A. Renwick J. Mod. Opt. 35 (1988), p.
1667. Abstract-INSPEC
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2. D.G. Stearns J. Appl. Phys. 71 (1992), p. 4286. Abstract-INSPEC
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3. V.A. Chernov, V.I. Kondratev, N.V. Kovalenko, S.V. Mytnichenko, Nucl.
Instr. and Meth. A 470 (2001) 145, these proceedings.

4. Brief description of the SR Experimental Station, Preprint, INP,
90-92, Novosibirsk, 1990.

Corresponding Author Contact Information <#m4.bcor*> Corresponding
author. Siberian SR Centre at Budker Institute of Nuclear Physics, 11
Lavrentyev Avenue, 630090 Novosibirsk, Russia. Tel.: +7-3832-394013;
fax: +7-3832-342163; email: s.v.mytnichenko@inp.nsk.su
<mailto:s.v.mytnichenko@inp.nsk.su>

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