Nuclear Instruments and Methods in Physics Research Section A: Accelerators,Spectrometers,Detectors and Associated Equipment
Volume 470, Issues 1-2,
1 September 2001,
Pages 155-157
DOI:
10.1016/S0168-9002(01)01015-4
PII: S0168-9002(01)01015-4
Copyright © 2001 Elsevier Science B.V. All rights reserved.
The use of quasi-Bragg diffuse scattering for express measurement of changes in multilayer d-spacing
V. A. Chernova, N. V. Kovalenkob and S. V. Mytnichenko
, 
, c
a Siberian SR Centre at Budker Institute of Nuclear Physics, 11 Lavrentyev Avenue, 630090 Novosibirsk, Russia
b Budker Institute of Nuclear Physics, 11 Lavrentyev Avenue, 630090 Novosibirsk, Russia
c Institute of Solid State Chemistry, 18 Kutateladze Str., 630128 Novosibirsk, Russia
Available online 28 August 2001.
Abstract
The possibility of the use of quasi-Bragg diffuse scattering for express measurements of changes in multilayer d-spacing was studied. The error of this method was shown to be minimal, if the incident or scattered angles are sufficiently far from the critical total external reflection or Bragg angles. As an example, the measurements of the W/Si multilayer mirror with linearly varying d-spacing are presented.
Author Keywords: X-ray diffuse scattering; Multilayer mirror
PACS classification codes: 68.55.-a; 61.10.Kw
Article Outline
- 1. Introduction
- 2. Experimental
- 3. Results
- 4. Conclusion
- Acknowledgements
- References
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Fig. 1. The principal scheme of the experiment. Quasi-Bragg scattering occurs at the total scattered angle equal to double Bragg angle (2
B), independent of the incident angle.
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Fig. 2. The multilayer d-spacing value measured at the same sample point by quasi-Bragg scattering versus the off-specular angle, 
. The central black point is the d-spacing value measured by the conventional specular diffraction.
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Fig. 3. The d-spacing values measured with the use of quasi-Bragg scattering along the gradient direction. The black points are values measured by the conventional specular diffraction.
References
1. A.V. Andreev, A.G. Michette and A. Renwick J. Mod. Opt. 35 (1988), p. 1667. Abstract-INSPEC
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2. D.G. Stearns J. Appl. Phys. 71 (1992), p. 4286. Abstract-INSPEC
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3. V.A. Chernov, V.I. Kondratev, N.V. Kovalenko, S.V. Mytnichenko, Nucl. Instr. and Meth. A 470 (2001) 145, these proceedings.
4. Brief description of the SR Experimental Station, Preprint, INP, 90-92, Novosibirsk, 1990.
Corresponding author. Siberian SR Centre at Budker Institute of Nuclear Physics, 11 Lavrentyev Avenue, 630090 Novosibirsk, Russia. Tel.: +7-3832-394013; fax: +7-3832-342163; email: s.v.mytnichenko@inp.nsk.su
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